design office for Atomic Layer Deposition
>> myplas.de www.myplas.de
vCardmodularflow  Oliver Feddersen-Clausen · Geisbergstr. 17 · 50939 Köln · Germany
Telefon: +49 221 290 73 -20 · Fax: +49 221 290 73 -19 · infomodularflow.com
copper & silver
precursors
temperature simulation of
low speed gas supply
component for
low speed gas supply
silver precursor
for Direct Liquid Injection
mini-ALD reaction chamber
enabling inline measurements with common measurement equipment
temperature simulation of
standard gas supply
supply unit for mini-ALD reaction chamber
with three evaporator systems
temperature simulation of
mini-ALD reaction chamber

Impressum:

modularflow
Oliver Feddersen-Clausen

Geisbergstr. 17, 50939 Köln
GERMANY

Telefon: +49 221 290 73 -20
Fax: +49 221 290 73 -19

E-Mail: infomodularflow.com
Internet: www.modularflow.com

USt-IdNr.: DE 270 536 676

Design & Umsetzung: floss design