modularflow Oliver Feddersen-Clausen · Unter der Hardt 17 · 51588 Nümbrecht · Germany Telefon: +49 2293 908 44 -48 · Fax: +49 2293 908 44 -47 · info
modularflow.com
copper & silver
precursors
precursors
temperature simulation of
low speed gas supply
low speed gas supply
component for
low speed gas supply
low speed gas supply
silver precursor
for Direct Liquid Injection
for Direct Liquid Injection
mini-ALD reaction chamber
enabling inline measurements with common measurement equipment
enabling inline measurements with common measurement equipment
temperature simulation of
standard gas supply
standard gas supply
supply unit for mini-ALD reaction chamber
with three evaporator systems
with three evaporator systems
temperature simulation of
mini-ALD reaction chamber
mini-ALD reaction chamber
Impressum:
modularflow
Oliver Feddersen-Clausen
Unter der Hardt 17,
51588 Nümbrecht
GERMANY
Telefon: +49 2293 908 44 -48
Fax: +49 2293 908 44 -47
E-Mail: infomodularflow.com
Internet: www.modularflow.com
USt-IdNr.: DE 270 536 676
Design & Umsetzung: floss design
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