design office for Atomic Layer Deposition
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vCardmodularflow  Oliver Feddersen-Clausen · Unter der Hardt 17 · 51588 Nümbrecht · Germany
Telefon: +49 2293 908 44 -48 · Fax: +49 2293 908 44 -47 · infomodularflow.com
copper & silver
precursors
temperature simulation of
low speed gas supply
component for
low speed gas supply
silver precursor
for Direct Liquid Injection
mini-ALD reaction chamber
enabling inline measurements with common measurement equipment
temperature simulation of
standard gas supply
supply unit for mini-ALD reaction chamber
with three evaporator systems
temperature simulation of
mini-ALD reaction chamber

Impressum:

modularflow
Oliver Feddersen-Clausen

Unter der Hardt 17, 51588 Nümbrecht
GERMANY

Telefon: +49 2293 908 44 -48
Fax: +49 2293 908 44 -47

E-Mail: infomodularflow.com
Internet: www.modularflow.com

USt-IdNr.: DE 270 536 676

Design & Umsetzung: floss design